Motorized Control Valve
The 2/2-way diaphragm globe valve Gemü C53 iComline was developed for precise and demanding control applications in semiconductor production.
The sealing concept of the valve is based on the tried-and-tested Gemü PD design, with actuator and medium separated by a regulating cone made of resistant PTFE. Cone contour, actuator stroke and connection size can be customized to meet customers’ requirements. According to Gemü the C53 iComline satisfies virtually all control and flow requirements of the high-tech semiconductor industry. The valve combinates a precise stepper motor with ultra pure body materials. It is particularly suitable for lithography, CMP and etching processes, as well as applications in the analysis field of any semiconductor production process.